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Facilities: Microfabrication Laboratory

As of 2026, we have access to a brand-new Microfabrication Facility, established as part of the Northern Engineering and Robotics Innovation Centre (NERIC) at the University of Salford. This state-of-the-art Facility enables us to drive impact by developing prototype microdevices based on our research findings. At the heart of the facility is a high-specification cleanroom environment, operating at conditions which are 1,000 times cleaner than a standard laboratory, ensuring precision fabrication at the micro- and nanoscale.

Some examples of the devices we can fabricate include:

  • Microfluidics, or “lab-on-a-chip”
  • Integrated photonics chips
  • Electrical devices and sensors
  • Energy harvesting systems and
  • Chemical sensing platforms
Our plasma sputterer and e-beam evaporator.
Our University logo, embossed in Al on Si. The total design is 1mm across
Drs Christian Clausner and Stephen Church outside of the cleanroom.

An interdigitated capacitive sensor, designed and fabricated by students on the Microsystems and Nanoengineering MSc.

The facility is equipped with advanced microfabrication and characterisation tools, including:

  • RF and DC plasma sputtering with co-deposition capability
  • Electron beam evaporation
  • Wide-field UV photolithography with 600 nm resolution across 8 inch wafers
  • Wet-etching of semiconductors and metals
  • Electrical characterisation and probe station
  • Surface profilometry
  • Scanning electron microscopy

Cleanroom training and skills

Cleanroom expertise is in high demand across industries such as: pharmaceuticals, aerospace, semiconductor manufacturing and advanced materials engineering. This facility plays a key role in equipping students with these critical skills through hands-on training in cleanroom protocols and microfabrication techniques. Students can gain this experience in the following programmes:

Work With Us

Whether you’re looking to prototype a device, develop new processes, or access specialist equipment, our Microfabrication Facility is ready to support your innovation journey.

We are open to new academic and industrial collaborations. Please contact the research scientist in charge, Dr Joe Neilson, if you would like to work with us: j.neilson@salford.ac.uk.

The Facility is also available for use by companies within the Greater Manchester Combined Authority and there are mechanisms that will provide funding to cover the costs. Contact NERIC for more information.

Get in touch today to start your project.